updated 12/1/2010 10:16:43 AM ET 2010-12-01T15:16:43

BEVERLY, Mass., Dec. 1, 2010 (GLOBE NEWSWIRE) -- Axcelis Technologies, Inc. (Nasdaq:ACLS) today announced that the Company has shipped its 100th Paradigm TM Series high energy implanter to one of the world's largest semiconductor manufacturers located in Asia. This recent shipment builds on the Company's strong relationship with the customer, who has a significant installed base of Axcelis high current, high energy and medium current implanters being used in high volume logic, FLASH and DRAM manufacturing. The company has the world's largest installed base of high energy implanters.

"Axcelis' reputation for high energy leadership is well earned," said Mary Puma, chairman and CEO. "In 1994, we launched the world's first production high energy implanter, bringing the benefits of high energy to mainstream, high volume IC fabrication with exceptional productivity and lowest total cost. Since then, we have continued this legacy of innovation with an evolutionary series of products that have set the benchmark for high energy implantation. This latest milestone is a reflection of our ongoing commitment to provide our customers with solutions to reach new heights in device performance."

The company's high energy product line, which includes the Optima XE series of single wafer systems as well as the Paradigm Series of multi wafer systems, delivers the industry's highest productivity, superior reliability and lowest total cost for high volume production. Together, they are the only complete high energy solution capable of addressing all traditional and emerging high energy application requirements. Both systems utilize the production proven RF Linear Accelerator (LINAC) which delivers benchmark reliability and uptime performance. Axcelis introduced the first RF LINAC based system in 1986, with the introduction of the NV-1000 high energy implanter. Since that time, the RF LINAC has become the industry standard for high energy implant technology. 

Learn more about the Company's complete product portfolio at their technology showcase during the SEMI Japan tradeshow being held at Makuhari Messe in Chiba, Japan from December 1-3. Customers and press are invited to visit the Axcelis booth #2B-401 at any time during the show.   

About Axcelis

Axcelis Technologies, Inc. (Nasdaq:ACLS) headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life support of ion implantation and cleaning systems. The company's Internet address is: www.axcelis.com .

CONTACT:  Axcelis Technologies, Inc.
          Maureen Hart (editorial/media)
            978.787.4266
            Maureen.hart@axcelis.com
          Stephen Bassett (financial community)
            978.787.4110
            Stephen.bassett@axcelis.com

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