updated 6/13/2011 1:46:42 PM ET 2011-06-13T17:46:42

CHELMSFORD, Mass., June 13, 2011 (GLOBE NEWSWIRE) -- Brooks Automation, Inc. (Nasdaq:BRKS) announces the continued roll-out of the Simplicity Solutions™ Model 830 Vacuum Quality Monitor (VQM™) from its Granville-Phillips® Product Center in Longmont Colorado. Vacuum technologists are finding that in addition to knowing the pressure of their chamber, understanding the gas composition can be equally as important. The 830 VQM transforms complex measurement data into comprehensive, easily used information over the complete 1-135 amu measurement range under vacuum pressures from UHV to 10-5 Torr.

The technology behind this breakthrough is an autoresonant ion trap which represents an entirely new way of mass selection. It starts with ion creation which includes capturing all ions within the trap; an electrostatic field keeps the ions oscillating within the trap at their resonant frequency; and the ions are ejected through an autoresonant energy pumping process using a low amplitude RF frequency scan. This technique delivers many advantages, including speed (85 msec for a 1-135 amu scan), low power consumption (8 W typical), small size, simple calibration, and remote sensor operation meaning the electronics can be remote from the sensor and any controller can drive any sensor.

"I am impressed with the UHV sensitivity of the VQM," said Jonathan Denlinger, Staff Scientist at Lawrence Berkeley Laboratory. "The VQM spectra provided a more accurate representation of the gas composition than my quadrupole RGA."

"We are very excited about the new autoresonant ion trap technology and the VQM product," said Joergen Olsson, GM of Brooks Automation's Granville-Phillips Product Center. "Customers are realizing the benefits and see this product as a significant extension to our current line of vacuum gauges."

The 830 VQM system is available now and consists of an ion trap mass spectrometer gauge, a VQM Controller and VQM Viewer software that provides the ratio of each gas to others in the measurement range, and, with the addition of the 390 total pressure measurement kit, the partial pressures of each gas.

For more information go to www.brooks.com or email vqm@brooks.com.

About Brooks Automation, Inc.

Brooks is a leading worldwide provider of automation, vacuum and instrumentation solutions to the global semiconductor and related industries. Our products and services are meeting the needs of customers across a broad spectrum of applications and industries and the global semiconductor manufacturing sector is our largest served market. When demanding productivity and availability objectives are essential factors for success, customers throughout the world turn to Brooks Automation, Inc.

CONTACT: Brooks Automation, Inc.
         Barbara Culhane
         Corporate Marketing Manager
         978-262-2400
         barbara.culhane@brooks.com

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