Axcelis Optima XEx High Energy Implanter Selected as New Tool of Record for Advanced IC Manufacturing by Asian Chipmaker

/ Source: GlobeNewswire

BEVERLY, Mass., Nov. 3, 2010 (GLOBE NEWSWIRE) -- Axcelis Technologies, Inc. (Nasdaq:ACLS) today announced that the Company's Optima XEx high energy implanter has been selected as the new process tool of record by a leading IC manufacturer located in Asia. The system will be used in high volume device manufacturing for 32nm technologies and beyond. The Optima XEx was chosen to replace the competitor's system as tool of record because of its proven capability to provide dramatically higher productivity and superior reliability in high volume production.

"We're proud to build on our relationship with this customer in the high energy segment, and look forward to a close collaboration as they expand their advanced manufacturing capabilities. The innovative Optima XEx design provides customers an unprecedented two-fold productivity increase over alternative systems, for optimized capital efficiency and lowest total operating costs," said Bill Bintz, senior vice president of marketing. "This new penetration is the latest in a series of penetrations that have expanded our leading market presence and share position."

About Axcelis

Axcelis Technologies, Inc. (Nasdaq:ACLS) headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life support of ion implantation and cleaning systems. The company's Internet address is: .

CONTACT: Axcelis Technologies, Inc. Editorial/Media Maureen Hart 978.787.4266 Maureen.hart@axcelis.com Financial Community Stephen Bassett 978.787.4110 Stephen.bassett@axcelis.com